GMB#9134 (2023) Unused Isel IWH 2 Link Arm Wafer Handling Robot, Logosol Pre Aligner in USA

Brand: Isel

Model: IWH 2 Link Arm, Body Series 1

Year: 2023

Repeatability

T ±0.02°

R ±0.02 mm

Z ±0.02 mm

Working Range: Z 10″

Radial: 10″

Theta: 500°

Payload: up to 3 kg

Maximum Speed:

T 360°/s

R 1,000 mm/s

Z 450 mm/s

Power supply: 115 – 230 VAC

50 – 60 Hz

500 VA (standard)

550 VA (advanced)

Main Interface: RS-232 [DB9]

Ethernet [RJ-45]

Weight approx. 25 – 32 kg

Equipped With:

2x 4mm hoses compressed air (EEF1, 5 bar)

1x 3,2mm tube vacuum (EEF2)

I/O ́s : +24V, GND, flu signal IN3, flu detection IN4, mapper OUT5,

Mapper IN5, Gripper OUT9

3 axis Prealigner, 3-8″

Vacuum, Peek chuck, 10KCPR

Bottom entry

LPA-38-3-V40P1-S23-B-V500P-NE

Standalone

Specs:

Wafer Diameter 3″, 100mm, 125mm, 150mm, 200mm

Wafer Opacity Transparent, Semi-Transparent, Opaque

Square Substrates Applicable

Wafer Handling Vacuum Chuck and Pins

Centering Accuracy ±25um on the Prealigner Chuck

Angular

Accuracy

(3 Sigma)

10000 CPR Encoder ±0.04° on the Prealigner Chuck

24000 CPR Encoder ±0.02° on the Prealigner Chuck

Servo Axes Three

Host Communication RS232, Ethernet

Max Initial Wafer Offset 12mm

Body Dimensions (W x L x H) 173mm x 267mm x 190mm

Footprint Compatibility LPA26-3, LPA58-3

LPA4EH-3, LPA5EH-3, LPA6EH-3, LPA8EH-3

Weight 5.00kg

Facilities Required 100-240VAC, 50/60Hz, 48VA, or 24VDC/2A

Vacuum 12″ Hg

Flat/Notch Compatibility SEMI Standards Compliant

Cleanliness Class 1

MTBF More than 70000 hours

*Standard wait time on new unit-50 weeks

This unit is unused and available immediately

Location: USA

Price exworks as is / where is

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